Precision Stages

ALIO Industries manufactures precision stages that fit the requirements for a wide variety of micromachining applications.

ALIO manufactures the best-in-class nanometer-level motion control & precision stages

Regardless of category, ALIO linear products have been designed and manufactured to provide unequalled performance and reliability. ALIO Industries has developed leading-edge 6-D Nano Positioning® air bearing motion systems for a wide range of applications in manufacturing, inspection/repair, and metrology. ALIO Industries’ Z-Lift motion platforms were created to address the unavoidable inaccuracies of Z-Wedge vertical stages, as well as to reduce the footprint and improve performance of linear stages mounted in the vertical orientation. 

ALlO has perfected its ability to customize its core motion control solutions to fit a wide variety of industrial manufacturing applications and provide customers with solid precision stage solutions to fit their needs.

ALIO Industries has also developed:

TRUE NANO® precision rotary stages to meet and exceed today’s demand for high precision rotary motion Cartesian Gantries

Hybrid Hexapod with better than 100 nm 3-Dimensional 6 axis Point Precision repeatability.

Micron 2 (µII) High Precision Motion Systems family to compete in the lower cost, lower precision micron world.

Proven ALIO Precision Stage Products

Laser Gimbal® | Five-Axis Positioning Workstation

ALIO’s Laser Gimbal® Five Axis Positioning Workstation is the world’s only positioning system with 5-D vector path laser triggering. The system provides a novel solution for engineers and manufacturers that are using additive and subtractive laser processing techniques on cutting-edge materials to produce a variety of next generation products.

Additive Manufacturing | Phone Antenna Direct printing

ALIO is capable of programmable path and contour control using its novel forward and inverse kinematic algorithms. This Hybrid Hexapod operates at 100mm/sec 3D path velocity and is capable of micron-level path accuracy. In this Hybrid Hexapod® system the nozzle proximity is kept too within 5 microns of surface and was designed for a 24/7 production environment

Optical Camera Module Assembly / Test

ALIO’s MINI Hybrid Hexapod® is ideal for automated lens alignment/bonding to CCD arrays. It has been helpful in building camera array modules, translational OIS, telescopic integrated lenses for miniature cameras used in everyday products like cell phone cameras and drones. Any application requiring 6-degrees of freedom positioning with nanometer/arc-sec levels of incremental motion and repeatability is a good fit for this product where product sensor resolution improvements are driving the need for higher precision.

Sensor Metrology

ALIO has provided systems to many of the world’s largest metrology companies for their internal measurements systems. The company can provide solutions for the most precise targets.

Hybrid Hexapod® | For Wafer Metrology

ALIO has supplied a 5-axis, open frame Hybrid Hexapod® design for wafer metrology. Its precision comes from precision crossed roller bearings and integrated frameless DC servo motors driving ball screws. It has a cubic travel range of 350 mm “X” x 350 mm “Y” x 75 mm Z x and tip/tilt travel +/- 2 degrees. ALIO was able to provide +/- 0.1-micron bidirectional XYZ repeatability.

Wafer Metrology Low-Profile XY-Theta with Large Open Aperture

ALIO’s vacuum expertise and broad selection of stages allowed the opportunity to couple four HV (10-7 Torr) stages to provide a nano-precision® solution. This R-XY-Z stack once again uses a pure linear based Z solution vs. the legacy Z-wedge design.

ALIO Motion Control Product Applications

Fiber/Optical Assembly (Private Label)

ALIO has an in-depth range of motion control products that allows for the ability to truly customize motion control solutions. This technology capability sets the company ahead of other solution providers. ALIO also offers significant value added by being able to match OEM customers’ needs as well as applying new world nano-precision applications. The ALIO commitment is to exceed OEM requirements that helps its customers become leaders in their respective industry sectors.

Customers can rely on ALIO for unique applications due to the company’s long track record of successfully delivering complex prototypes that meet or exceed the stipulated original specifications.

Nano Metrology

ALIO has taken its industry-leading, near air-bearing performance open center metrology stages to the next level. This crossed roller bearing 300mm XY Nano Metrology® stage is DC Servo linear motion driven with 300mm open center, has unmatched motion performance with 3-Sigma, 6-D (linear straightness, flatness, pitch, yaw and roll) and bi-directional repeatability of less than +/- 250nm. In other words, the volumetric bi-directional repeatability of any XY point is within a sphere of 500nm or less.

Custom Motion Stage Solutions

ALIO has an in-depth range of motion control products that allows for the ability to truly customize motion control solutions. This technology capability sets the company ahead of other solution providers. ALIO also offers significant value added by being able to match OEM customers’ needs as well as applying new world nano-precision applications. The ALIO commitment is to exceed OEM requirements that helps its customers become leaders in their respective industry sectors.

Customers can rely on ALIO for unique applications due to the company’s long track record of successfully delivering complex prototypes that meet or exceed the stipulated original specifications.

Send us details of your motion control and part positioning requirements.

Our team will quickly evaluate and recommend the best solution to meet your specifications. Upload your part drawing files or sketches on our Contact Us form below.

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