Vacuum Compatible Motion Stages

Vacuum Compatible Motion Stages

ALIO’s extensive range of ultra-precise and repeatable motion control solutions (except for its air bearing systems) are vacuum compatible.

Linear, rotary, open center X-Y, hexapods, tripods and goniometer stages and systems are available in HV (10-7 TORR) or UHV (10-10 TORR) with ultra-Low outgassing materials and components all carefully prepared and baked. 

Drive mechanisms, bearings, feedback systems, motion controllers and the kinematic structure, all need to be designed to perfection to meet nanometer precision in atmospheric or vacuum environments.

Send us details of your motion control and part positioning requirements.

Our team will quickly evaluate and recommend the best solution to meet your specifications. Upload your part drawing files or sketches on our Contact Us form below.

Please contact us – we are ready to assist!